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天车 OHT – 尊芯 Zooming Skip to content

天车 OHT

⽤于半导体车间，空中⾃动化传送设备
通过物料调度系统（MCS）进⾏控制，完成FOUP的⾃动传送
半导体设备E84标准通讯协议，与Stocker/EQ进行对接
满⾜SEMI标准，与上层系统实现数据交互
使用非接触式供电，满足洁净车间内的洁净需求
洁净等级可满足ISO Class5