用于半导体领域300/200mm FOUP标准SEMI载具的自动化存储
可实现与OHT E84自动对接,兼容人工上下料
SEMIE88(Stocker SEM) Standard与MES上层对接
可实时上报系统各种状态数据,实现工厂智能管理
模块化设计,可根据客户储量节拍要求快速开发
acf
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